SEMI-GEN SYSTEMS PVT LTD

UHP GAS CABINETS

The system that supplies specialty gas in the small volume. With safety devices for gas leakage detection and programmed automatic operation, it detects gas leakage in the early stage and supplies gas safely by preventing the operator’s mistakes.

System Specifications
  • Supply Method : Automatic change type
  • Control Method : Full automatic system
  • Supply Container : 49 Liter
  • Supply Flow Rate : 30 SLPM. (Max Flow Rate@ N2 Gas)
  • Supply Pressure : 0.1~0.9MPa
  • System Dimensions : 800(w) x 550(d) x 2200(h) Without controller
  • System Weight : 190kg
  • Color : White Gray (EX4504(S)-SR-WH020)
System Features
  • Easy to operate
  • Safety device by gas characteristics
  • Erroneous operation prevention interlock
  • Alarms and alarm history control
  • Possible to install in the explosion hazard area
  • Communication support for host monitoring